Sensirion SFC5500/SFM5500 Mass Flow Controllers/Meters
Sensirion SFC5500/SFM5500 Mass Flow Controllers/Meters are digital multi-gas CMOSens®-based devices that measure gas mass flow by the calorimetric principle based on heat transfer. The controllers/meters achieve unmatched ratings for speed, accuracy, and repeatability at a very attractive system cost. A heater element on a thermally insulated membrane and two thermopiles located upstream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. A larger channel design makes the device more robust against particles, clogging, and humidified gases. Due to the compact single-chip design and mounting between metal parts, CMOSens®-based sensors are also very resistant to electromagnetic disturbances (EMC).
A fully compensated flow measurement value can be delivered every millisecond with amplification, A/D conversion, digital linearization, and temperature compensation matched to the sensor speed. The SFC5500 mass flow controllers show zero-drift performance and control true mass flow independently of the ambient temperature and pressure changes. A special arrangement of the two temperature sensors, on-chip temperature compensation, and the minimization of noise sources lead to unbeatable performance with regards to repeatability and accuracy over a large dynamic range.
Features
- Excellent accuracy and repeatability (0.8%/0.1% of setpoint respectively)
- Very wide control range (better than 1000:1)
- G ¼″ flange compatible with a broad range of connectors (e.g. Swagelok, Legris, Festo)
- Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
- Ultra-fast settling time (<100ms)
- Digital interface with temperature-compensated output
- NIST-traceable calibration
- Mean Time Between Failures (MTBF) 169 years
- No drift and no re-calibration required in the field
Specifications
- <100ms typical setting time
- 1000Hz measurement frequency
- Better than 1000:1 control range
- 1s warm-up time
- 0 to +50°C (+32°F to +122°F) ambient operating temperature range
- 10bar/145psig maximum input pressure
- 5bar/73psig maximum differential pressure
Videos
Block Diagram
Additional Resources
- Gas Chromatography: Real-Time Monitoring and Control to Provide Optimal Solutions
- Quick Start Users Guide
- Application Note: SHDLC Communication Interface Reference for the SFC5500 Mass Flow Controllers
- Application Note: Exchangeable Fittings for the SFC5500 Mass Flow Controllers
- Thin Film Deposition
- Gas Chromatography
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