MiCS Compact MOS Air Quality Sensors

Amphenol SGX Sensortech MiCS Compact MOS Air Quality Sensors are robust MEMS sensors with a small 5mm x 7mm x 1.55mm footprint for gas detection in harsh environments. These sensors are suitable for air quality monitoring, gas leak detection, and pollution detection among others. The silicon gas sensor structure of these MiCS sensors consists of an accurately micromachined diaphragm with an embedded heating resistor and a sensing layer on top. These air quality sensors feature less than 10s response time and operate within a -30°C to +85°C temperature range.